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  1. 1
    Reduction of Parasitic Capacitance of A PDMS Capacitive Force Sensor
    by Tatsuho Nagatomo, Norihisa Miki
    Published 2018-11-01
    Subjects: “...capacitive force sensor...”
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    Article
  2. 2
    MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
    Subjects: “...Capacitive force sensor...”
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  3. 3
    Selected Papers from the 8th Symposium on Micro-Nano Science and Technology on Micromachines
    Published 2019
    Subjects: “...capacitive force sensor...”
    Open Access: DOAB: description of the publication
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