Chemical vapor deposition 29 Chemical vapour deposition 11 QC Physics 9 Substrates 9 TJ Mechanical engineering and machinery 8 Carbon nanotubes 7 Thin films 7 Amorphous carbon 6 Field emission microscopes 6 Field emission scanning electron microscopy 6 Temperature 5 Zinc oxide 5 Carbon films 4 Catalysts 4 Organometallics 4 Raman spectroscopy 4 Scanning electron microscopy 4 Semiconductor doping 4 TK Electrical engineering. Electronics Nuclear engineering 4 Thermal chemical vapor deposition 4 chemical vapor deposition (CVD) 4 Carrier concentration 3 Coatings 3 Electrical properties 3 Field effect transistors 3 Graphene 3 II-VI semiconductors 3 Lows-temperatures 3 Manufacture 3 Micro Raman Spectroscopy 3