Showing 1 - 4 results of 4 for search '"Double exposure lithography"', query time: 1.17s Refine Results
  1. 1
    The new method of fabrication of submicron structures by optical lithography with mask shifting and mask rotation
    Subjects: “...double exposure lithography...”
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  2. 2
    Applications of photolithographic techniques : materials modeling for double-exposure lithography and development of shape-encoded biosensor arrays
    by Lee, Shao-Chien
    Published 2009
    Subjects: “...Double-exposure lithography...”
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  3. 3
    Catalysis and materials development in organic chemistry
    by Berro, Adam Joseph
    Published 2010
    Subjects: “...Double exposure lithography...”
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  4. 4
    Design and development of material-based resolution enhancement techniques for optical lithography
    by Gu, Xinyu
    Published 2013
    Subjects: “...Double exposure lithography...”
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