History of engineering and technology 34 Technology: general issues 30 MEMS 24 Circuits & components 7 Materials science 7 Research & information: general 7 TK Electrical engineering. Electronics Nuclear engineering 7 human 7 Electronics engineering 6 Physics 6 Resonators 6 Electromechanical devices 5 Humans 5 Natural frequencies 5 Biotechnology 4 CMOS integrated circuits 4 Energy industries & utilities 4 History of engineering & technology 4 Integrated circuit design 4 Microphones 4 Phase noise 4 Piezoelectricity 4 Silicon 4 Silicon wafers 4 controlled study 4 Accelerometers 3 Acoustic surface wave devices 3 Acoustic waves 3 Article 3 Biology, life sciences 3