MEMS 24 Electromechanical devices 5 Natural frequencies 5 Resonators 5 Microphones 4 Phase noise 4 Piezoelectricity 4 Silicon wafers 4 CMOS integrated circuits 3 Electrodes 3 Integrated circuit design 3 Low-power consumption 3 MEMS (microelectromechanical system) 3 Micro electromechanical system (MEMS) 3 Microelectromechanical devices 3 Microfabrication 3 Microsensors 3 Oscillators (electronic) 3 Silicon 3 Vibrations (mechanical) 3 Water quality 3 % reductions 2 Accelerometers 2 Acoustic surface wave devices 2 Acoustic waves 2 Adhesive lamination 2 Adhesives 2 Capacitance 2 Capacitive microphone 2 Cascode amplifiers 2