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6by Orłowska Karolina, Świątkowski Michał, Kunicki Piotr, Słupski Piotr, Sankowska Anna, Sankowska Anna, Sankowska Anna, Sankowska Anna, Gotszalk TeodorSubjects: “...MEMS/NEMS deflection measurement...”
Published 2014-08-01
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7by Nico F. de Rooij, Peter Vettiger, Tomonobu Nakayama, Sebastian Gautsch, Kota Shiba, Frederic Loizeau, Terunobu Akiyama, Genki Yoshikawa, Masakazu AonoSubjects: “...MEMS/NEMS...”
Published 2012-11-01
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9by Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich KopylovSubjects: “...MEMS/NEMS heterostructures...”
Published 2009-01-01
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11by Marzia Sara Vaccaro, Francesco Paolo Pinnola, Francesco Marotti de Sciarra, Raffaele BarrettaSubjects: “...MEMS/NEMS...”
Published 2021-04-01
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12by Lei Wei, Xuebao Kuai, Yidi Bao, Jiangtao Wei, Liangliang Yang, Peishuai Song, Mingliang Zhang, Fuhua Yang, Xiaodong WangSubjects: “...MEMS/NEMS...”
Published 2021-06-01
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14by Mohammad S. Islam, Ran Wei, Jaesung Lee, Yong Xie, Soumyajit Mandal, Philip X.-L. FengSubjects: “...micro/nanoelectromechanical systems (MEMS/NEMS)...”
Published 2018-10-01
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16Published 2019Subjects: “...micro/nanoelectromechanical systems (MEMS/NEMS)...”
Open Access: DOAB: description of the publication
Open Access: DOAB, download the publication
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