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  1. 1
    MEMS Mirrors
    Published 2018
    Subjects: “...MEMS mirror applications...”
    Open Access: DOAB, download the publication
    Open Access: DOAB: description of the publication
    eBook
  2. 2
    Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
    Subjects: “...large-area and ultrathin MEMS mirror...”
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    Article
  3. 3
    MEMS Mirrors for LiDAR: A review
    by Dingkang Wang, Connor Watkins, Huikai Xie
    Published 2020-04-01
    Subjects: “...mems mirror...”
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    Article
  4. 4
    Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
    Subjects: “...MEMS mirror...”
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    Article
  5. 5
    Integrated Optoelectronic Position Sensor for Scanning Micromirrors
    Subjects: “...MEMS mirror...”
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    Article
  6. 6
    Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO<sub>2</sub> Bimorphs
    Subjects: “...electrothermal mems mirror...”
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    Article
  7. 7
    An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
    by Liang Zhou, Xiaoyang Zhang, Huikai Xie
    Published 2019-05-01
    Subjects: “...MEMS mirror...”
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    Article
  8. 8
    High-Q MEMS Resonators for Laser Beam Scanning Displays
    Subjects: “...MEMS mirror...”
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    Article
  9. 9
    Nondestructive On-Site Detection of Soybean Contents Based on An Electrothermal MEMS Fourier Transform Spectrometer
    Subjects: “...MEMS mirror...”
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    Article
  10. 10
    Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
    Subjects: “...MEMS mirror arrays...”
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    Article
  11. 11
    A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering
    Subjects: “...MEMS mirror...”
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    Article
  12. 12
    Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror
    Subjects: “...MEMS mirror...”
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    Article
  13. 13
    Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
    Subjects: “...microelectromechanical systems (MEMS) mirror...”
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    Article
  14. 14
    A Study of Correction to the Point Cloud Distortion Based on MEMS LiDAR System
    Subjects: “...MEMS mirror...”
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    Article
  15. 15
    A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications
    by Dong Zheng, Dingkang Wang, YK Yoon, Huikai Xie
    Published 2020-11-01
    Subjects: “...MEMS mirror...”
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    Article
  16. 16
    A Customized Two Photon Fluorescence Imaging Probe Based on 2D scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators
    Subjects: “...micro-electro-mechanical system (MEMS) mirror...”
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    Article
  17. 17
    Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors
    Subjects: “...micro-electro-mechanical system (MEMS) mirror...”
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    Article
  18. 18
    A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph
    by Xiaoyang Zhang, Liang Zhou, Huikai Xie
    Published 2015-12-01
    Subjects: “...microelectromechanical systems (MEMS) mirror...”
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    Article
  19. 19
    Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism
    Subjects: “...MEMS mirrors...”
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    Article
  20. 20
    Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights
    by Ji, Y., Li, J., Liu, K., Xu, B.
    Published 2022
    Subjects: “...MEMS mirror...”
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    Article
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