History of engineering and technology 9 MOSFET devices 9 Technology: general issues 7 MOSFETs 6 MOS devices 5 Threshold voltage 4 Computer circuits 3 Gate dielectrics 3 MOS-FET 3 MOSFET 3 Metals 3 Oxide semiconductors 3 Atomic layer deposition 2 Atomic layer deposition (ALD) 2 Atomic-layer deposition 2 Circuits & components 2 Dielectric devices 2 Drain current 2 Energy industries and utilities 2 Fabrication 2 GaInAs 2 High electron mobility transistors 2 Impact ionization 2 Inverse subthreshold slope 2 Inverse subthreshold slopes 2 Logic gates 2 Metallic compounds 2 Power 2 Power MOSFET 2 RF performance 2