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optical lithography
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genetic algorithm
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laser lithography
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source optimization
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2by Lucilene Dornelles Mello, Alexandre Kisner, Arnaldo Pereira, Lauro Tatsuo KubotaSubjects: “...optical lithography...”
Published 2013-01-01
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5by Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, Ya ChengSubjects: “...optical lithography...”
Published 2019-09-01
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7by Foulkes, John EdwardSubjects: “...Absorbance Modulation Optical Lithography...”
Published 2011
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8by Rongbo Wu, Min Wang, Jian Xu, Jia Qi, Wei Chu, Zhiwei Fang, Jianhao Zhang, Junxia Zhou, Lingling Qiao, Zhifang Chai, Jintian Lin, Ya ChengSubjects: “...optical lithography...”
Published 2018-11-01
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9by Rodrigues, RanceSubjects: “...Optical Lithography...”
Published 2010
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11by Fang Wei, Lei Jian, Zhang Pengda, Qin Fei, Jiang Meiling, Zhu Xufeng, Hu Dejiao, Cao Yaoyu, Li XiangpingSubjects: “...two photon-optimization optical lithography...”
Published 2020-04-01
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14by Changtao Wang, Wei Zhang, Zeyu Zhao, Yanqin Wang, Ping Gao, Yunfei Luo, Xiangang LuoSubjects: “...nano optical lithography...”
Published 2016-07-01
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20by Piqueras Ruipérez, Miguel ÁngelSubjects: “...Optical Lithography...”
Published 2016
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Doctoral Thesis