Search Results - "anisotropic wet chemical etching"

1

Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si

by Jović Vesna, Lamovec Jelena, Popović Mirjana, Lazić Žarko
Published 2007-01-01
Subjects: “...anisotropic wet chemical etching...”

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2

Fabrication of SiO2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si

by VESNA JOVIC, JELENA LAMOVEC, MIRJANA POPOVIC, ZARKO LAZIC
Published 2007-11-01
Subjects: “...anisotropic wet chemical etching...”

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