Suggested Topics within your search.
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Anisotropic etching
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Anisotropic wet etching
1
Anisotropy
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Blazed grating
1
Boundary integral equations
1
Diffraction efficiency
1
Diffraction gratings
1
Fabrication
1
Higher diffraction
1
Infrared devices
1
Micro mirror
1
Near-infrared
1
Oxidation sharpening
1
Platform and fillet
1
Scanning
1
Scanning grating
1
Silicon
1
Silicon-blazed grating
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Spectral range
1
Spectrum analysis
1
Surface roughness
1
Topography
1
Wet etching
1
anisotropic wet etching
1
diffraction efficiency
1
oxidation sharpening
1
platform and fillet
1
silicon-blazed grating
1
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1by Kapil Debnath, Ali Z Khokhar, Stuart A Boden, Hideo Arimoto, Swe Zin Oo, Harold M H Chong, Graham Trevor Reed, Shinichi SaitoSubjects: “...Anisotropic wet etching...”
Published 2016-11-01
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2by Kapil eDebnath, Hideo eArimoto, Muhammad K. Husain, Alyssa ePrasmusinto, Abdelrahman eAl-Attili, Rafidah ePetra, Harold M H Chong, Graham Trevor Reed, Shinichi eSaitoSubjects: “...Anisotropic wet etching...”
Published 2016-02-01
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6by James Byers, Kapil Debnath, Hideo Arimoto, Muhammad K. Husain, Moïse Sotto, Joseph Hillier, Kian Kiang, David J. Thomson, Graham T. Reed, Martin Charlton, Shinichi SaitoSubjects: “...anisotropic wet etching...”
Published 2021-05-01
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