Size Effects of Poly-Si Formed by Laser Annealing With Periodic Intensity Distribution on the TFT Characteristics

by Akira Mizutani, Fuminobu Hamano, Daisuke Nakamura, Tetsuya Goto, Siti Rahmah Aid, Hiroshi Ikenoue
Published 2021-01-01

Fabrication of CMOS Invertors in Si Thin-Film-Transistors by Laser Doping Using a Chemical Solution Coating

by Kaname Imokawa, Takayuki Kurashige, Akira Suwa, Daisuke Nakamura, Taizoh Sadoh, Tetsuya Goto, Hiroshi Ikenoue
Published 2020-01-01