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1by Claudio Mendoza, Manuel A. Bautista, Jérôme Deprince, Javier A. García, Efraín Gatuzz, Thomas W. Gorczyca, Timothy R. Kallman, Patrick Palmeri, Pascal Quinet, Michael C. WitthoeftSubjects: “...high-density plasmas...”
Published 2021-02-01
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2by Shunjiro ShinoharaSubjects: “...high-density plasma...”
Published 2018-01-01
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4Analyse des processus de dérive lors de la gravure profonde du silicium dans des plasmas SF6 et C4F8by Fradet, MathieuSubjects: “...High-density plasmas...”
Published 2015
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