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1by Alina A. Dobronosova, Anton I. Ignatov, Olga S. Sorokina, Nikolay A. Orlikovskiy, Michail Andronik, Aleksey R. Matanin, Kirill O. Buzaverov, Daria A. Ezenkova, Sergey A. Avdeev, Dimitry A. Baklykov, Vitaly V. Ryzhkov, Aleksander M. Merzlikin, Aleksander V. Baryshev, Ilya A. Ryzhikov, Ilya A. RodionovSubjects: “...low-damage alumina etch...”
Published 2019-10-01
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