A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

by Wei Wang, Jiapin Chen, Aleksandar. S. Zivkovic, Huikai Xie
Published 2016-09-01

Analysis of Dynamic Performance of a Kalman Filter for Combining Multiple MEMS Gyroscopes

by Liang Xue, Lixin Wang, Tao Xiong, Chengyu Jiang, Weizheng Yuan
Published 2014-11-01

Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS

by Ramin Mirzazadeh, Stefano Mariani
Published 2017-08-01

Lamb Wave AlN Micromechanical Filters Integrated With On-chip Capacitors for RF Front-End Architectures

by Ji Liang, Hongxiang Zhang, Daihua Zhang, Hao Zhang, Wei Pang
Published 2015-01-01

On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves

by P. S. Marinushkin, A. A. Levitsky, F. G. Zograf, V. A. Bakhtina
Published 2020-11-01

Infinite Selectivity of Wet SiO₂ Etching in Respect to Al

by Imrich Gablech, Jan Brodský, Jan Pekárek, Pavel Neužil
Published 2020-03-01

Single-Pixel MEMS Imaging Systems

by Guangcan Zhou, Zi Heng Lim, Yi Qi, Guangya Zhou
Published 2020-02-01

Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

by Tianxiang Zheng, Shuo Chen, Linxu Lei, Zhanfeng Deng, Cheng Zhang, Xing Yang, Haodong Zou, Menghan Xu
Published 2017-07-01

Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability

by Xuejun Fan, Liangbiao Chen, C.P. Wong, Hsing-Wei Chu, G.Q. Zhang
Published 2015-09-01

Digital Micromirror Device (DMD)-Based High-Cycle Torsional Fatigue Testing Micromachine for 1D Nanomaterials

by Chenchen Jiang, Dayong Hu, Yang Lu
Published 2016-03-01

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

by Yonggang Yin, Zhengxiang Fang, Yunfeng Liu, Fengtian Han
Published 2019-03-01

21.69–24.36 GHz MEMS Tunable Band-Pass Filter

by Zhongliang Deng, Hao Wei, Xubing Guo
Published 2016-08-01

COMBINING SENSORS WITH AIRBORNE TELEMETRY INSTRUMENTATION TO MAKE RANGE MEASUREMENTS AND OBTAIN AERODYNAMICS

by Davis, Bradford S., Brown, T. Gordon
Published 1999

LEVERAGING GOVERNMENT AND COMMERCIAL INVESTMENTS

by D’Amico, William P.
Published 1999

Research and Analysis of MEMS Switches in Different Frequency Bands

by Wenchao Tian, Ping Li, LinXiao Yuan
Published 2018-04-01

High-Performance MIM Capacitors for a Secondary Power Supply Application

by Jiliang Mu, Xiujian Chou, Zongmin Ma, Jian He, Jijun Xiong
Published 2018-02-01

Indoor Positioning with Smartphones:The State-of-the-art and the Challenges

by CHEN Ruizhi, CHEN Liang
Published 2017-10-01

Design and Near-Infrared Actuation of a Gold Nanorod–Polymer Microelectromechanical Device for On-Demand Drug Delivery

by John Jackson, Aurora Chen, Hongbin Zhang, Helen Burt, Mu Chiao
Published 2018-01-01

Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges

by Makoto Takamura, Hajime Okamoto, Kazuaki Furukawa, Hiroshi Yamaguchi, Hiroki Hibino
Published 2016-09-01

MEMS-Based Wavelength-Selective Bolometers

by Thang Duy Dao, Anh Tung Doan, Satoshi Ishii, Takahiro Yokoyama, Handegård Sele Ørjan, Dang Hai Ngo, Tomoko Ohki, Akihiko Ohi, Yoshiki Wada, Chisato Niikura, Shinsuke Miyajima, Toshihide Nabatame, Tadaaki Nagao
Published 2019-06-01