Showing 1 - 2 results of 2 for search '"multilevel metallization"', query time: 0.73s Refine Results
  1. 1
    Particle Technology in Chemical Mechanical Planarization
    by Kalyan S. Gokhale, Brij M. Moudgil
    Published 2014-03-01
    Subjects: “...multilevel metallization...”
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    Article
  2. 2
    Process Optimization of Via Plug Multilevel Interconnections in CMOS Logic Devices
    by Yinhua Cui, Jeong Yeul Jeong, Yuan Gao, Sung Gyu Pyo
    Published 2019-12-01
    Subjects: “...multilevel metallization...”
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    Article
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