Showing 1 - 2 results of 2 for search '"polysilicon morphology"', query time: 1.34s Refine Results
  1. 1
    Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests
    by Ramin Mirzazadeh, Aldo Ghisi, Stefano Mariani
    Published 2018-01-01
    Subjects: “...polysilicon morphology...”
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    Article
  2. 2
    Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
    Subjects: “...polysilicon morphology...”
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    Article
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