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Discharge conditions
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Electric discharges
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Gas temperature
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Ionization of gases
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Light emission
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Magnetron sputtering
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Magnetron sputtering plasma
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Nitride deposition
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Nitrogen spectra
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Optical emission spectroscopy
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Optical emissions
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Plasma diagnostics
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Reactive magnetron sputtering
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Rotational temperature
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Spectrometers
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Titanium nitride
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5by Takanori Nishiyama, Makoto Taguchi, Hidehiko Suzuki, Peter Dalin, Yasunobu Ogawa, Urban Brändström, Takeshi SakanoiSubjects: “...OH rotational temperature...”
Published 2021-01-01
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8by Aldalbahi, A., Hafiz Mamat, M., Khairul Ahmad, M., Lias, J., Nayan, N., Ren How, S., Rusop Mahmood, M., Zainizan Sahdan, M.Subjects: “...Rotational temperature...”
Published 2018
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10by Peters, FraukeSubjects: “...rotational temperature...”
Published 2019
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Doctoral Thesis -
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