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Er2O3 coating by reactive magnetron sputtering: Effect of oxygen supply and erbium pre-layer deposition
by
P.A. Rayjada
,
N.P. Vaghela
,
R. Rahman
,
M. Bhatnagar
,
M. Ranjan
,
N.L. Chauhan
,
Amit Sircar
,
L.M. Manocha
,
P.M. Raole
Published 2016-12-01
Subjects:
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coating
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Amit Sircar
1
L.M. Manocha
1
M. Bhatnagar
M. Ranjan
1
N.L. Chauhan
1
N.P. Vaghela
1
P.A. Rayjada
1
P.M. Raole
1
R. Rahman
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