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2by Chambettaz, Florentin“.... The subject of this thesis is part of this problematic: a controlled sequential etching process...”
Published 2018
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3by Dubois, Jérôme“... be etched without damaging the under layer, which can no longer be managed using processes based on high...”
Published 2016
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6by Kalita, Dipankar“.... Firstly defects were induced in a controllable way using chemical method and were analyzed using Raman...”
Published 2015
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8by Suard, Mathieu“... stratégies sont aussi proposées pour réduire la proportion de volume "inefficace" et améliorer le contrôle de...”
Published 2015
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9by Zamanillo López, Isabel“... chemical and thermomechanical stabilization. The control of the chemistry of this sol-gel phase, its...”
Published 2015
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10by Bézard, Philippe“... without loosing the CD control, an other process constituted of an acetic acidbath followed by a...”
Published 2016
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11by Paquet, Anne“... lithographie mais elle est plutôt déterminée par la taille de l’espaceur, obtenue en contrôlant l’épaisseur de...”
Published 2019
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12by Gondcharton, Paul“... of circuits, the development and control of assembly processes becomes crucial. Among the different techniques...”
Published 2015
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13by Derville, Alexandre“... ...). This omnipresence associated with the economic stakes generates two problems related to the process control...”
Published 2018
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14by Mokni, Marwa“... are used in wide industrial applications. Optimized and controlled conditions of the CVD process...”
Published 2016
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15by Rueda-Fonseca, Pamela“... principaux ont été abordés : i) la qualité et le contrôle des propriétés structurales, électroniques et...”
Published 2015
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16by Skopin, Evgenii“... the ALD process, it is possible to control the time delay (or cycle number) prior to 3D growth begins...”
Published 2018
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17by Farcot, Lauren“...-seasonal storage of heat, because energy is stored as a chemical potential and therefore, there is no heat...”
Published 2018
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18by Pointet, John“... primordial de savoir contrôler ces courants de fuite tout en gardant la forte valeur de constante...”
Published 2015
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19by Takacs, Hélène“... ensures an efficient protection against oxidation and serves as a chemical functionalization surface...”
Published 2015
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20by Serege, Matthieu“... high selective processes.However, the layers to be analyzed are chemically highly reactive because...”
Published 2017
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