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3“... problems of neural controllers and investigates their control performance on chemical...”
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4“..., the Chemical Mechanical Polishing (CMP) process is the only way to provide global planarization of VLSI process...”
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5“... for chemical-mechanical polishing process. By continuously adjusting the pressure of different polishing zones...”
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6“...碩士 === 長庚大學 === 化工與材料工程研究所 === 94 === As we know, chemical mechanism polishing (CMP) process takes...”
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7“... submicron manufacturing processes. It is known that chemical mechanical planarization (CMP) is a direct...”
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8“... will be built and used to control the chemical coagulation and sedimentation process. ...”
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9“... frequently used process control strategies. The principle of MPC is to have a process model, which is able...”
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10“... chemical mechanical polishing processes. In this new process control scheme, the least-squared method...”
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11“...碩士 === 東海大學 === 工業工程與經營資訊學系 === 92 === SPC (Statistical Process Control) is the earliest...”
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12“...碩士 === 國立交通大學 === 機械工程系所 === 95 === Chemical-Mechanical Polish is an extremely complicated process...”
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14“... Control Banding, (CCB) to high-tech touch-panel production processes. The results were then used...”
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16“...碩士 === 元智大學 === 工業工程與管理學系 === 99 === The statistical process control was usually based...”
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17by 賴明宏“... the process variance of Pad-Boron Silicon Glass (Pad-BSG) of Plasma Enhanced-Chemical Vapor Deposition (PE-CVD...”
Published 2008
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18“... ideally control with the deposition thickness and ununiformity would improve the quality of PECVD process. ...”
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19“... for the complex and highly nonlinear chemical processes. Successful applications to the real...”
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20“... regulations require institutions to carry out process hazard analysis, in order to identify and control...”
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