“... manufacturing equipment as well as in a clean room when the semiconductor manufacturing equipment is used...”
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“...碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 103 === The technology roadmap of semiconductor devices has...”
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“...碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 100 === As the semiconductor technology has shrunk the half...”
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“... in semiconductor manufacturing. The Cavity Ring-Down Spectroscopy (CRDS) was used for measuring hydrogen fluoride...”
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“... products, the semiconductor manufacturing processes take a step from diameter to miniaturization...”
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“... in semiconductor manufacturing processes. This study evaluated the influences of micro-comtamination control...”
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“... kWh/cm2-wafer area, meeting the International Technology Roadmap for Semiconductors (i.e., 0.8 kWh/cm2...”
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