Showing 1 - 17 results of 17 for search 'SEMICONDUCTOR PROCESS TECHNOLOGY', query time: 1.24s Refine Results
  1. 1
    Applications of reference cycle building and K-shape clustering for anomaly detection in the semiconductor manufacturing process
    “...Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology...”
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  2. 2
    Multivariable analysis of spectral measurements for the characterization of semiconductor processes
    “... semiconductor processes in real-time. This thesis focuses on the analysis of multivariate methods and optical...”
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  3. 3
    Design of experiments on a semiconductor plasma ashing process : methods and analysis
    by Nerurkar, Tanay Rahul
    Published 2017
    “... and controlling process variations in semiconductor manufacturing processes is crucial to ensure the extremely low...”
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  4. 4
    Control of a semiconductor dry etch process using variation and correlation analyses
    by Nilgianskul, Tan
    Published 2017
    “...Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical...”
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  5. 5
    Novel machine learning approaches for modeling variations in semiconductor manufacturing
    “... varying semiconductor manufacturing processes are developed. Challenges include class imbalance, concept...”
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  6. 6
    Anomaly detection in semiconductor manufacturing through time series forecasting using neural networks
    “...Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology...”
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  7. 7
    Machine learning for automated anomaly detection in semiconductor manufacturing
    by DeLaus, Michael Daniel.
    Published 2019
    “... of semiconductor manufacturing, detecting anomalies during manufacturing processes is crucial. However, current...”
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  8. 8
    Modeling of planarization technologies
    by Truque, Daniel
    Published 2008
    “...Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...”
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  9. 9
    Time series data analytics : clustering-based anomaly detection techniques for quality control in semiconductor manufacturing
    by Makhlouk, Oumaïma
    Published 2019
    “...Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology...”
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  10. 10
    Study of CMOS process variation by multiplexing analog characteristics
    “...Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering...”
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  11. 11
    Modeling of advanced integrated circuit planarization processes : electrochemical-mechanical planarization (eCMP), STI CMP using non-conventional slurries
    by Johnson, Joy Marie
    Published 2010
    “... dimensions, and employing novel structures, semiconductor processing must also advance to effectively...”
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  12. 12
    A case model for predictive maintenance
    “...Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, February...”
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  13. 13
    Integrated model-based run-to-run uniformity control for epitaxial silicon deposition.
    by Gower, Aaron E. (Aaron Elwood)
    Published 2005
    “.... === Semiconductor fabrication facilities require an increasingly expensive and integrated set of processes...”
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  14. 14
    Development of a run by run control benchmarking and simulation system
    “...Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...”
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  15. 15
    Environmentally benign manufacturing of three dimensional integrated circuits
    by Somani, Ajay
    Published 2008
    “.... === (cont.) The "handle wafer" unit process in the existing 3D IC technology, which is a crucial process...”
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  16. 16
    Characterization and modeling of pattern dependencies and time evolution in plasma etching
    by Farahanchi, Ali
    Published 2010
    “...Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering...”
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  17. 17
    A feature-to-wafer-scale model of etch-rate non-uniformity in deep reactive ion etching/
    “...Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering...”
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