III-V semiconductors Alumina 1 Aluminum nitride 1 Aluminum oxide 1 BCD process 1 BN films 1 Boron nitride 1 Boron nitride films 1 Chemical vapor deposition 1 Chemical vapor deposition process 1 Chemical vapour deposition 1 Circuit architectures 1 Crystalline films 1 Diffractograms 1 Fourier transform infrared spectroscopy 1 GaN e-HEMT 1 Gallium nitride 1 Gate drivers 1 High Speed 1 High electron mobility transistors 1 High-speed switching 1 Nitrides 1 Polytypes 1 Power devices 1 Power semiconductor devices 1 Power semiconductors 1 Sapphire 1 Sapphire substrates 1 Substrates 1 System stability 1