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SMR PROCESSING AND TESTING
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Recognition of dislocation structure of silicon carbide epitaxial layers by а neural network
by
A.V. Bragin
,
D.V. Pyanzin
,
R.I. Sidorov
,
D.A. Skvortsov
Published 2020-08-01
“
... and a direct distribution neural network. The method was
tested
on homoepitaxial lay-ers of 4H-polytype...
”
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A.V. Bragin
D.A. Skvortsov
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D.V. Pyanzin
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R.I. Sidorov
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