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Alexander Efremov
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Alexander Efremov
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Alexander Efremov
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1
A Computational Realization of a Semi-Lagrangian Method for Solving the Advection Equation
by
Alexander
Efremov
,
Eugeniya Karepova
,
Vladimir Shaydurov
,
Alexander Vyatkin
Published 2014-01-01
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Article
2
On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO<sub>2</sub> and Si<sub>x</sub>N<sub>y</sub>) in Multi-Componen...
by
Alexander
Efremov
,
Byung Jun Lee
,
Kwang-Ho Kwon
Published 2021-03-01
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Article
3
Plasma Parameters and Etching Characteristics of SiO<sub>x</sub>N<sub>y</sub> Films in CF<sub>4</sub> + O<sub>2</sub> + X (X = C<sub>4</sub>F<sub>8</sub> or CF<sub>2</sub>Br<sub>2<...
by
Yunho Nam
,
Alexander
Efremov
,
Byung Jun Lee
,
Kwang-Ho Kwon
Published 2020-12-01
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Article
4
Dry Etching Performance and Gas-Phase Parameters of C<sub>6</sub>F<sub>12</sub>O + Ar Plasma in Comparison with CF<sub>4</sub> + Ar
by
Nomin Lim
,
Yeon Sik Choi
,
Alexander
Efremov
,
Kwang-Ho Kwon
Published 2021-03-01
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Article
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