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Andrea Castiello
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Laser Annealing of P and Al Implanted 4H-SiC Epitaxial Layers
by
Cristiano Calabretta
,
Marta Agati
,
Massimo Zimbone
,
Simona Boninelli
,
Andrea
Castiello
,
Alessandro Pecora
,
Guglielmo Fortunato
,
Lucia Calcagno
,
Lorenzo Torrisi
,
Francesco La Via
Published 2019-10-01
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