Rigorous coupled-wave analysis of absorption enhancement in vertically illuminated silicon photodiodes with photon-trapping hole arrays

by Gou Jun, Cansizoglu Hilal, Bartolo-Perez Cesar, Ghandiparsi Soroush, Mayet Ahmed S., Rabiee-Golgir Hossein, Gao Yang, Wang Jun, Yamada Toshishige, Devine Ekaterina Ponizovskaya, Elrefaie Aly F., Wang Shih-Yuan, Islam M. Saif
Published 2019-09-01