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Baumgarten, R.
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Baumgarten, R.
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Synthesis of High Surface Area—Group 13—Metal Oxides via Atomic Layer Deposition on Mesoporous Silica
by
Baumgarten
,
R
.
,
D’alnoncourt, R.N
,
Driess, M.
,
Ingale, P.
,
Knemeyer, K.
,
Rosowski, F.
Published 2022
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Related Subjects
Ga2O3
In2O3
atomic layer deposition
high surface area
mesoporous silica
metal oxides
thermogravimetry
trimethylgallium
trimethylindium
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