Resist roughness Bi-modality as revealed by two-dimensional FFT 2D analysis

by Cann, Susan G., Fedynyshyn, Theodore H., Baranov, Leonid, Gotkis, Yehiel
Published 2010

PAG segregation during exposure affecting innate material roughness

by Pottebaum, Indira, Cann, Susan G., Cabral, Alberto, Astolfi, David K., Fedynyshyn, Theodore H., Roberts, Jeanette M.
Published 2010