Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope

by Fuhua Yang, Guowei Han, Chaowei Si, Jin Ning
Published 2013-08-01

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

by Yurong He, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning, Fuhua Yang
Published 2021-01-01

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

by Yan Su, Pengfei Xu, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang
Published 2020-02-01

Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

by Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning
Published 2015-09-01

Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

by Jian Yang, Chaowei Si, Fan Yang, Guowei Han, Jin Ning, Fuhua Yang, Xiaodong Wang
Published 2018-02-01

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

by Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang
Published 2020-01-01

Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

by Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, Jin Ning
Published 2015-02-01

Research on Wafer-Level MEMS Packaging with Through-Glass Vias

by Fan Yang, Guowei Han, Jian Yang, Meng Zhang, Jin Ning, Fuhua Yang, Chaowei Si
Published 2018-12-01

PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

by Yan Su, Xin Tong, Nan Liu, Guowei Han, Chaowei Si, Jin Ning, Zhaofeng Li, Fuhua Yang
Published 2018-03-01

A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

by Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Jin Ning, Yongmei Zhao, Fuhua Yang, Xiaodong Wang
Published 2019-04-01

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

by Pengfei Xu, Zhenyu Wei, Zhiyu Guo, Lu Jia, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang
Published 2021-04-01

Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication

by Meng Zhang, Jian Yang, Yurong He, Fan Yang, Yongmei Zhao, Fen Xue, Guowei Han, Chaowei Si, Jin Ning
Published 2019-06-01

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

by Jian Yang, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang, Xiaodong Wang
Published 2019-09-01