Showing 1 - 1 results of 1 for search 'Chiu, Wei-Gang', query time: 0.07s Refine Results
  1. 1
    Low-k SiCxNy Films Prepared by Plasma- Enhanced Chemical Vapor Deposition Using Methyl-aza-2,2,4 Trimethylsilacyclopentane Precursor
    by Chiu, Wei-Gang, 邱維剛
    Published 2012
    Get full text
    Others
Search Tools: Get RSS Feed — Email this Search