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Choonghee Cho
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Choonghee Cho
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Epitaxial Growth of Si and SiGe Using High-Order Silanes without a Carrier Gas at Low Temperatures via UHVCVD and LPCVD
by
Dae-Seop Byeon
,
Choonghee
Cho
,
Dongmin Yoon
,
Yongjoon Choi
,
Kiseok Lee
,
Seunghyun Baik
,
Dae-Hong Ko
Published 2021-05-01
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