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Diego Marini
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Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon
by
Sergio Sapienza
,
Matteo Ferri
,
Luca Belsito
,
Diego
Marini
,
Marcin Zielinski
,
Francesco La Via
,
Alberto Roncaglia
Published 2021-09-01
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