Spectromicroscopic Studies of Porous Silicon Oxide on Silicon Using Synchrotron Radiation

by Elena V. Parinova, Dmitry Marchenko, Aleksander K. Fedotov, Dmitry A. Koyuda, Julia A. Fedotova, Ruslan Ovsyanniko, Sergey Yu. Turishchev
Published 2020-03-01

HIGH TEMPERATURE ANNEALING INFLUENCE ON STRUCTURE AND COMPOSITION OF a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES BY SYNCHROTRON XANES INVESTIGATIONS

by Dmitry A. Koyuda, Vladimir A. Terekhov, Alexey V. Ershov, Elena V. Parinova, Alexandra K. Pisliaruk, Irina A. Karabanova, Sergey Yu. Turishchev
Published 2018-09-01

STRUCTURE AND COMPOSITION EVOLUTION a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES UNDER HIGH TEMPERATURE ANNEAL

by Sergey Yu. Turishchev, Dmitry A. Koyuda, Alexey V. Ershov, Ulii A. Vainer, Tatiana V. Kulikova, Boris L. Agapov, Elena N. Zinchenko, Margarita V. Grechkina, Daria S. Usoltseva, Vladimir A. Terekhov
Published 2018-09-01