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Dong Seon Uh
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1
Synthesis and Solubility Study of the Polyamides Containing 4,4'-(9- fluorenylidene)dianiline in the Backbone as an Antireflecting Spin-on Hardmask Materials
by
Irina Nam
,
Dong
Seon
Uh
,
Chang Il Oh
,
Jin Kuk Lee
,
Jae Min Oh
,
Jong Seob Kim
Published 2007-01-01
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