Investigation of Position and Velocity Stability of the Nanometer Resolution Linear Motor Stage with Air Bearings by Shaping of Controller Transfer Function

by Artur Piščalov, Edgaras Urbonas, Nikolaj Višniakov, Darius Zabulionis, Artūras Kilikevičius
Published 2020-12-01

Investigation of X and Y Configuration Modal and Dynamic Response to Velocity Excitation of the Nanometer Resolution Linear Servo Motor Stage with Quasi-Industrial Guiding System i...

by Artur Piščalov, Edgaras Urbonas, Darius Vainorius, Jonas Matijošius, Artūras Kilikevičius
Published 2021-04-01