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Edward Duffy
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On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas
by
Bishal Kafle
,
Ahmed Ismail Ridoy
,
Eleni Miethig
,
Laurent Clochard
,
Edward
Duffy
,
Marc Hofmann
,
Jochen Rentsch
Published 2020-11-01
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