Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

by Laura Keskiväli, Matti Putkonen, Eini Puhakka, Eija Kenttä, Jeroen Kint, Ranjith K. Ramachandran, Christophe Detavernier, Pekka Simell
Published 2018-07-01