Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

by Sebastian Heedt, Marina Quintero-Pérez, Francesco Borsoi, Alexandra Fursina, Nick van Loo, Grzegorz P. Mazur, Michał P. Nowak, Mark Ammerlaan, Kongyi Li, Svetlana Korneychuk, Jie Shen, May An Y. van de Poll, Ghada Badawy, Sasa Gazibegovic, Nick de Jong, Pavel Aseev, Kevin van Hoogdalem, Erik P. A. M. Bakkers, Leo P. Kouwenhoven
Published 2021-08-01