Two planar polishing methods by using FIB technique: Toward ultimate top-down delayering for failure analysis

by D. D. Wang, Y. M. Huang, P. K. Tan, H. Feng, G. R. Low, H. H. Yap, R. He, H. Tan, M. K. Dawood, Y. Z. Zhao, J. Lam, Z. H. Mai
Published 2015-12-01