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Hirotsugu Sugiura
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Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor De...
by
Hirotsugu
Sugiura
,
Hiroki Kondo
,
Takayoshi Tsutsumi
,
Kenji Ishikawa
,
Masaru Hori
Published 2019-01-01
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