Growth and Selective Etch of Phosphorus-Doped Silicon/Silicon–Germanium Multilayers Structures for Vertical Transistors Application

by Chen Li, Hongxiao Lin, Junjie Li, Xiaogen Yin, Yongkui Zhang, Zhenzhen Kong, Guilei Wang, Huilong Zhu, Henry H. Radamson
Published 2020-12-01

High Performance p-i-n Photodetectors on Ge-on-Insulator Platform

by Xuewei Zhao, Guilei Wang, Hongxiao Lin, Yong Du, Xue Luo, Zhenzhen Kong, Jiale Su, Junjie Li, Wenjuan Xiong, Yuanhao Miao, Haiou Li, Guoping Guo, Henry H. Radamson
Published 2021-04-01

Investigation of the Heteroepitaxial Process Optimization of Ge Layers on Si (001) by RPCVD

by Yong Du, Zhenzhen Kong, Muhammet Toprak, Guilei Wang, Yuanhao Miao, Buqing Xu, Jiahan Yu, Ben Li, Hongxiao Lin, Jianghao Han, Yan Dong, Wenwu Wang, Henry H. Radamson
Published 2021-04-01

Strain Modulation of Selectively and/or Globally Grown Ge Layers

by Yong Du, Guilei Wang, Yuanhao Miao, Buqing Xu, Ben Li, Zhenzhen Kong, Jiahan Yu, Xuewei Zhao, Hongxiao Lin, Jiale Su, Jianghao Han, Jinbiao Liu, Yan Dong, Wenwu Wang, Henry H. Radamson
Published 2021-05-01

The Effect of Doping on the Digital Etching of Silicon-Selective Silicon–Germanium Using Nitric Acids

by Yangyang Li, Huilong Zhu, Zhenzhen Kong, Yongkui Zhang, Xuezheng Ai, Guilei Wang, Qi Wang, Ziyi Liu, Shunshun Lu, Lu Xie, Weixing Huang, Yongbo Liu, Chen Li, Junjie Li, Hongxiao Lin, Jiale Su, Chuanbin Zeng, Henry H. Radamson
Published 2021-05-01

State of the Art and Future Perspectives in Advanced CMOS Technology

by Henry H. Radamson, Huilong Zhu, Zhenhua Wu, Xiaobin He, Hongxiao Lin, Jinbiao Liu, Jinjuan Xiang, Zhenzhen Kong, Wenjuan Xiong, Junjie Li, Hushan Cui, Jianfeng Gao, Hong Yang, Yong Du, Buqing Xu, Ben Li, Xuewei Zhao, Jiahan Yu, Yan Dong, Guilei Wang
Published 2020-08-01

A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm

by Junjie Li, Yongliang Li, Na Zhou, Guilei Wang, Qingzhu Zhang, Anyan Du, Yongkui Zhang, Jianfeng Gao, Zhenzhen Kong, Hongxiao Lin, Jinjuan Xiang, Chen Li, Xiaogen Yin, Yangyang Li, Xiaolei Wang, Hong Yang, Xueli Ma, Jianghao Han, Jing Zhang, Tairan Hu, Tao Yang, Junfeng Li, Huaxiang Yin, Huilong Zhu, Wenwu Wang, Henry H. Radamson
Published 2020-02-01

Study of Silicon Nitride Inner Spacer Formation in Process of Gate-all-around Nano-Transistors

by Junjie Li, Yongliang Li, Na Zhou, Wenjuan Xiong, Guilei Wang, Qingzhu Zhang, Anyan Du, Jianfeng Gao, Zhenzhen Kong, Hongxiao Lin, Jinjuan Xiang, Chen Li, Xiaogen Yin, Xiaolei Wang, Hong Yang, Xueli Ma, Jianghao Han, Jing Zhang, Tairan Hu, Zhe Cao, Tao Yang, Junfeng Li, Huaxiang Yin, Huilong Zhu, Jun Luo, Wenwu Wang, Henry H. Radamson
Published 2020-04-01