Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

by Ivan Ohlídal, Jiří Vohánka, Martin Čermák
Published 2021-12-01

Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects

by Jiří Vohánka, Ivan Ohlídal, Miloslav Ohlídal, Štěpán Šustek, Martin Čermák, Václav Šulc, Petr Vašina, Jaroslav Ženíšek, Daniel Franta
Published 2019-06-01