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Jianzhuo Wu
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Jianzhuo Wu
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1
Structure and Dielectric Property of High-k ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone
by
Junqing Liu
,
Junpeng Li
,
Jianzhuo
Wu
,
Jiaming Sun
Published 2019-05-01
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Article
2
Effect of Composition, Interface, and Deposition Sequence on Electrical Properties of Nanolayered Ta2O5-Al2O3 Films Grown on Silicon by Atomic Layer Deposition
by
Junpeng Li
,
Jianzhuo
Wu
,
Junqing Liu
,
Jiaming Sun
Published 2019-03-01
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