Atomic Layer Deposition for the Conformal Coating of Nanoporous Materials

by Jeffrey W. Elam, Guang Xiong, Catherine Y. Han, H. Hau Wang, James P. Birrell, Ulrich Welp, John N. Hryn, Michael J. Pellin, Theodore F. Baumann, John F. Poco, Joe H. Satcher
Published 2006-01-01