Exposure to Volatile Organic Compounds and Possibility of Exposure to By-product Volatile Organic Compounds in Photolithography Processes in Semiconductor Manufacturing Factories

by Seung-Hyun Park, Jung-Ah Shin, Hyun-Hee Park, Gwang Yong Yi, Kwang-Jae Chung, Hae-Dong Park, Kab-Bae Kim, In-Seop Lee
Published 2011-09-01