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Karunaratne, M.
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Karunaratne, M.
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Karunaratne, M.
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1
Effect of point defect injection on diffusion of boron in silicon and silicon-germanium in the presence of carbon
by
Karunaratne
,
M
.S.A
,
Willoughby, A.F
,
Bonar, J.M
,
Zhang, J.
,
Ashburn, P.
Published 2005
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2
Effect of Fluorine Implantation Dose on Boron Transient Enhanced Diffusion and Boron Thermal Diffusion in Si1-xGex
by
El Mubarek, H.A.W
,
Karunaratne
,
M
.
,
Bonar, J.M
,
Dilliway, G.D
,
Wang, Y.
,
Hemment, P.L.F
,
Willoughby, A.F
,
Ashburn, P.
Published 2005
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3
Effect of fluorine implantation dose on boron thermal diffusion in silicon
by
El Mubarek, H.A.W
,
Bonar, J.M
,
Dilliway, G.D
,
Ashburn, P.
,
Karunaratne
,
M
.
,
Willoughby, A.F
,
Wang, Y.
,
Hemment, P.L.F
,
Price, R.
,
Zhang, J.
,
Ward, P.
Published 2004
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