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Kengo Hanaoka
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Kengo Hanaoka
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Kengo Hanaoka
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1
Vertical silicon etching by using an automatically and fast-controlled frequency tunable rf plasma source
by
Kengo
Hanaoka
,
Kazunori Takahashi
Published 2021-02-01
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Article
2
Fast and Automatic Control of a Frequency-Tuned Radiofrequency Plasma Source
by
Kazunori Takahashi
,
Kengo
Hanaoka
,
Akira Ando
Published 2020-01-01
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Article
3
Automatically Controlled Frequency-Tunable rf Plasma Thruster: Ion Beam and Thrust Measurements
by
Kazunori Takahashi
,
Ryoji Imai
,
Kengo
Hanaoka
Published 2021-03-01
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Article
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