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  1. 1
    Hochauflösender mikromechanischer Sensor zur Erfassung von Oberflächenprofilen
    by Kotarsky, Ulf
    Published 2005
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    Doctoral Thesis
  2. 2
    Hochauflösender mikromechanischer Sensor zur Erfassung von Oberflächenprofilen
    by Kotarsky, Ulf
    Published 2005
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    Doctoral Thesis
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